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SW165A-6045-SF
Special spindles
[Spindles for polishing
semiconductor wafers]
Spindles for semiconductor equipment manufactured by SAMWOO are currently used in two fields.
A spindle for quartz processing to process quartz , a semiconductor wafer material, and a spindle for wafer polishing to precisely polish processed wafers. The spindle for quartz processing uses a ball bearing with high rigidity to enhance machinability, and the spindle for polishing uses an air bearing to enhance precision.
In addition, we are custom-manufacturing various and special spindles for semiconductors.
Specification
| Housing diameter(Ø) | 165 |
|---|---|
| Housing material | Stainless steel |
| Rated power(S1)kw | 4.5 |
| Max speed(rpm) | 6,000 |
| Max frequency(Hz) | 200 |
| Rated torque(Nm) | 7 |
| Rated current(A) | 18 |
| Motor poles | 4 |
| Tool change | manual |
| Tool interface | straight |
| option | Flange |
| Cooling system | water / oil |
| Bearing lubrication | Air bush |
| Weight(kg) | 확인 |
| Cup wheel(Ø) | 200 |
Power & Torque Curve
Drawing
